![]() ![]() Note: Easy-to-maintain electron cyclotron resonance (ECR) plasma sputtering apparatus featuring hybrid waveguide and coaxial cables for microwave delivery The transmission and reflection coefficients at waveguide junctions are either calculated using the concept of the characteristic impedance or are directly numerically extracted using full-wave three-dimensional finite-difference frequency-domain simulations. We also show that the properties of the waveguide systems can be accurately described using a single-mode scattering matrix theory. We show that the incident waveguide mode is almost completely reflected on resonance, while far from the resonance the waveguide mode is almost completely transmitted. We investigate structures consisting of a single plasmonic coaxial resonator, which is terminated either in a short or an open circuit, side-coupled to a coaxial waveguide. The waveguides are placed on top of a silicon substrate, and the space between inner and outer coaxial metals is filled with silica. We use coaxial waveguides with square cross sections, which can be fabricated using lithography-based techniques. In particular, we investigate threedimensional nanostructures consisting of plasmonic coaxial stub resonators side-coupled to a plasmonic coaxial waveguide. In this paper, we introduce nanoscale devices based on plasmonic coaxial waveguide resonators. Waveguide-resonator systems are particularly useful for the development of several integrated photonic devices, such as tunable filters, optical switches, channel drop filters, reflectors, and impedance matching elements. Nanoscale devices based on plasmonic coaxial waveguide resonators ![]()
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